Design and fabrication of on-chip integrated polySiGe and polySi Peltier devices
- 1 August 2000
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 85 (1-3) , 316-323
- https://doi.org/10.1016/s0924-4247(00)00417-9
Abstract
No abstract availableKeywords
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