A physically based predictive model of Si/SiO2 interface trap generation resulting from the presence of holes in the SiO2
- 24 November 1997
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 71 (21) , 3126-3128
- https://doi.org/10.1063/1.120284
Abstract
No abstract availableKeywords
This publication has 24 references indexed in Scilit:
- A model of hole trapping in SiO2 films on siliconJournal of Applied Physics, 1997
- Molecular hydrogen, E' center hole traps, and radiation induced interface traps in MOS devicesIEEE Transactions on Nuclear Science, 1993
- Generation mechanisms of paramagnetic centers by gamma-ray irradiation at and near the Si/SiO2 interfaceJournal of Applied Physics, 1993
- Correlation of Fixed Positive Charge and E′γ Centers as Measured via Electron Injection and Electron Paramagnetic Resonance TechniquesJournal of the Electrochemical Society, 1991
- Post-irradiation behavior of the interface state density and the trapped positive chargeIEEE Transactions on Nuclear Science, 1990
- Kinetics of passivation of centers at the (111) Si- interfacePhysical Review B, 1988
- Electron and hole traps in SiO/sub 2/ films thermally grown on Si substrates in ultra-dry oxygenIEEE Transactions on Electron Devices, 1988
- Time-dependent interface trap effects in MOS devicesIEEE Transactions on Nuclear Science, 1988
- Hole traps and trivalent silicon centers in metal/oxide/silicon devicesJournal of Applied Physics, 1984
- Study of Silicon-Silicon Dioxide Structure by Electron Spin Resonance IIJapanese Journal of Applied Physics, 1972