Tensile Strength and Fracture Toughness of Surface Micromachined Polycrystalline Silicon Thin Films Prepared Under Various Conditions

This publication has 5 references indexed in Scilit:

• New test structures and techniques for measurement of mechanical properties of MEMS materials
  Published by SPIE-Intl Soc Optical Eng ,1996
• Tensile Testing of Polycrystalline Silicon Thin Films Using Electrostatic Force Grip.
  IEEJ Transactions on Sensors and Micromachines, 1996
• Large grain polycrystalline silicon by low-temperature annealing of low-pressure chemical vapor deposited amorphous silicon films
  Journal of Applied Physics, 1988
• Mechanical properties and microstructures of Al-1%Si thin film metallizations
  Thin Solid Films, 1987
• A change of etch rate associated with the amorphous to crystalline transition in CVD layers of silicon
  Solid-State Electronics, 1977