Ellipsometry study of the adhesion of dielectric thin films on polymer substrates

Publisher Website

1 October 1993

journal article
Published by Elsevier in Thin Solid Films

Vol. 233 (1-2) , 256-259
https://doi.org/10.1016/0040-6090(93)90102-u

Abstract

No abstract available

Keywords

THIN FILM

This publication has 5 references indexed in Scilit:

An IR phase-modulated ellipsometer using a Fourier transform spectrometer for in situ applications
Thin Solid Films, 1993
Infrared ellipsometry study of the oxidation mechanisms of hydrogenated amorphous silicon
Surface Science, 1992
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Applied Physics Letters, 1991
An in situ infrared study of the room temperature oxidation of silicon with atomic and molecular oxygen
Applied Surface Science, 1989
Oxygen-bonding environments in glow-discharge-deposited amorphous silicon-hydrogen alloy films
Physical Review B, 1983