Abstract
The structure of plasma polymers of ethane prepared by use of 13.56 MHz radiofrequency discharge in a tubular reactor are examined. The dependency of rate of deposition on power and on tube pressure at a fixed flow rate are presented. The plasma polymer prepared is tested for its performance as a protective coat on NaCl optical components for use in CO2 laser windows. Absorbance, at and around 10.6 μm, water‐vapor transmission, and scratch‐resistance tests are done.