Atomic force microscopy probe with piezoresistive read-out and a highly symmetrical Wheatstone bridge arrangement
- 10 May 2000
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 83 (1-3) , 47-53
- https://doi.org/10.1016/s0924-4247(00)00299-5
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- AFM probes with directly fabricated tipsJournal of Micromechanics and Microengineering, 1996
- Atomic force microscopy and lateral force microscopy using piezoresistive cantileversJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1996
- Formation of silicon tips with <1 nm radiusApplied Physics Letters, 1990