Pulsed Plasma Polymerization of Perfluorocyclohexane
- 1 January 1996
- journal article
- research article
- Published by American Chemical Society (ACS) in Macromolecules
- Vol. 29 (12) , 4220-4225
- https://doi.org/10.1021/ma951747q
Abstract
No abstract availableKeywords
This publication has 24 references indexed in Scilit:
- Influence of substrate material and ion bombardment on plasma-deposited fluorocarbon thin filmsJournal of Applied Polymer Science, 1994
- CFX(X=1–3) Radicals Controlled by On-Off Modulated Electron Cyclotron Resonance Plasma and Their Effects on Polymer Film DepositionJapanese Journal of Applied Physics, 1994
- Excited states of CF4 plasma for polymerization of TMPTA monomerJournal of Polymer Science Part A: Polymer Chemistry, 1992
- Molecular control of surface film compositions via pulsed radio-frequency plasma deposition of perfluoropropylene oxideChemistry of Materials, 1991
- The effect of power on the plasma-assisted deposition of fluorinated monomersJournal of Polymer Science Part A: Polymer Chemistry, 1990
- Low temperature pulsed plasma deposition: III. A method for the deposition of aluminium and tin at room temperatureThin Solid Films, 1990
- Mechanisms of deposition and etching of thin films of plasma-polymerized fluorinated monomers in radio frequency discharges fed with C2F6-H2 and C2F6-O2 mixturesJournal of Applied Physics, 1987
- Polymer film formation in C2F6H2 dischargesThin Solid Films, 1986
- Plasma polymerization. II. An ESCA investigation of polymers synthesized by excitation of inductively coupled RF plasma in perfluorobenzene and perfluorocyclohexaneJournal of Polymer Science: Polymer Chemistry Edition, 1980
- Some aspects of plasma polymerization investigated by pulsed R.F. dischargeJournal of Polymer Science: Polymer Chemistry Edition, 1977