Three dimensional silicon triple-hot-wire anemometer based on polyimide joints
- 27 November 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 3, 93-98
- https://doi.org/10.1109/memsys.1998.659735
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
- Double Pass Metallization For Cmos Aluminum ActuatorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- 3D structures with piezoresistive sensors in standard CMOSPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- A micromachined, silicon mass-air-flow sensor for automotive applicationsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- New structure for corner compensation in anisotropic KOH etchingJournal of Micromechanics and Microengineering, 1997
- Vibration modes of a resonant silicon tube density sensorJournal of Microelectromechanical Systems, 1996
- An integrated pressure—flow sensor for correlation measurements in turbulent gas flowsSensors and Actuators A: Physical, 1996
- A small-size silicon microphone for measurements in turbulent gas flowsSensors and Actuators A: Physical, 1994
- Microfabricated hingesSensors and Actuators A: Physical, 1992
- Silicon based flow sensors used for mean velocity and turbulence measurementsExperiments in Fluids, 1992
- A monolithic gas flow sensor with polyimide as thermal insulatorIEEE Transactions on Electron Devices, 1986