A new preparation method for large area electron-transparent silicon samples
- 1 March 1975
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 8 (3) , 197-199
- https://doi.org/10.1088/0022-3735/8/3/015
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- TEM observation of dislocation loops correlated with individual swirl defects in as-grown siliconApplied Physics Letters, 1974
- Preparation of Large-area Electron-transparent Samples from Silicon DevicesIBM Journal of Research and Development, 1974
- Recent observations on „swirl defects” in dislocation-free siliconPhysica Status Solidi (a), 1973
- Method for producing large Si films for preselected imperfection analysisJournal of Scientific Instruments, 1965
- Method of preparing Si and Ge specimens for examination by transmission electron microscopyBritish Journal of Applied Physics, 1962
- Sample Preparation for Transmission Electron Microscopy of GermaniumReview of Scientific Instruments, 1961