In situ growth of Y1Ba2Cu3O7−x superconducting thin films using a pulsed neodymium:yttrium aluminum garnet laser with CO2 laser heated substrates
- 11 March 1991
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 58 (10) , 1089-1091
- https://doi.org/10.1063/1.104380
Abstract
By replacing the resistive heater with a CO2 laser to heat the substrates together with concentered oxygen stream blowing onto the substrate during deposition, high quality Y1Ba2Cu3O7−x thin films with nearly perfect c‐axis orientation and Tc0=87 K were grown in situ without subsequent slow cooling in oxygen atmosphere or any further heat treatment. The rapid quenching, from typically 600 °C to room temperature in less than 50 s of the as‐deposited films, excludes the possibility of further oxygen incorporation during the cooling process and indicates that the in situ growth may have completed during deposition under proper deposition conditions.Keywords
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