Silicon nitride and oxynitride deposition by RT-LPCVD
- 1 March 1997
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 296 (1-2) , 32-36
- https://doi.org/10.1016/s0040-6090(96)09333-9
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
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