Silicon shadow mask MOVPE for in-plane thickness control of structures
- 1 January 1997
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 170 (1-4) , 661-664
- https://doi.org/10.1016/s0022-0248(96)00514-3
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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