Sensitivity of variable angle of incidence spectroscopic ellipsometry to compositional profiles of graded AlxGa1-xAs-GaAs structures
- 1 March 1994
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 74 (3) , 235-242
- https://doi.org/10.1016/0169-4332(94)90004-3
Abstract
No abstract availableKeywords
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