Analysis of waveform distortion due to the transit time effect in stroboscopic scanning electron microscopy

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Abstract
The degree of waveform distortion due to the transit time effect (TTE) is characterised by three parameters: the phase shift and the slope at half value of the amplitude, and the ratio of phase shift at 10% of the amplitude to that at half value of the amplitude in the step signal. Dependences of these three characterised parameters on normalised parameters from the scaling law of the stroboscopic voltage contrast are investigated. Results show that the waveform distortion depends mainly on the produce 2aE of the extraction field E and the electrode width 2a, the ratio of normalised measurement electrode width to the rise time of applied signal T, 2a/T, and a little on the detector type and the slice level of the S curve ITH; it is independent of the peak voltage applied to the measurement electrode VS in the range of 0.1 VS mod <or=5 V. An approximate calculation method for the waveform distortion is presented with reduces the calculation time by more than a factor of 100 as compared with the authors' previous precise method.