Electron beam polymerization of insulating films
- 1 March 1965
- journal article
- Published by Elsevier in Microelectronics Reliability
- Vol. 4 (1) , 109-110
- https://doi.org/10.1016/0026-2714(65)90269-6
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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