Electro-optical effect in aluminum nitride waveguides
- 1 May 1992
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 71 (9) , 4136-4139
- https://doi.org/10.1063/1.350844
Abstract
We fabricated thin optical layers in aluminum nitride by magnetron sputtering. Using the techniques of integrated optics, we characterized the layers and we determined the electro‐optic coefficients of AlN: r13 = 0.67 pm/V and r33 = −0.59 pm/V.This publication has 8 references indexed in Scilit:
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