Experimental studies of ionization processes in sputtering of GaAs
- 1 March 1996
- journal article
- Published by Elsevier in Surface Science
- Vol. 348 (1-2) , 100-104
- https://doi.org/10.1016/0039-6028(95)00995-7
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- Study of ionization processes in sputtering of LiFSurface Science, 1994
- Formation of ions in sputteringSpectrochimica Acta Part B: Atomic Spectroscopy, 1989
- Mechanisms of atomic ion emission during sputteringNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986
- Electronic excitations in collision cascades and the ionization of sputtered particlesApplied Physics Letters, 1984
- Sputtering studies with the Monte Carlo Program TRIM.SPApplied Physics A, 1984
- Substrate surface excitations and ionization of particles sputtered from GaAsApplied Physics Letters, 1983
- Electron slowing-down spectra in aluminum metalPhysical Review B, 1977
- Atom Ejection Studies for Sputtering of SemiconductorsJournal of Applied Physics, 1966