Thermodynamic Calculation of the VPE Growth of In1-xGaxAs by the Trichloride Method
- 1 January 1984
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 23 (1R)
- https://doi.org/10.1143/jjap.23.74
Abstract
A method of computation developed for analysing the equilibrium state of a multicomponent system, has been extended to the epitaxial growth of In1-x Ga x As performed by the trichloride (AsCl3) method. The general features of the equilibrium partial pressures are found to be similar to those of the hydride system. The deposition diagram is computed as a function of the input mole ratio, and the effect of the growth parameters on the composition of the deposit is discussed in comparison with other techniques. It is shown that the thermodynamic model can explain the slow growth rates observed in both the trichloride and the single flat-temperature zone methods.Keywords
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