Gettering of Impurities in Silicon
- 1 January 1985
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- Observation of Order-Disorder Transitions in Strained-Semiconductor SystemsPhysical Review Letters, 1985
- Silicon interstitial generation by argon implantationApplied Physics Letters, 1985
- Phosphorus gettering and intrinsic gettering of nickel in siliconApplied Physics Letters, 1984
- Early stages of oxygen segregation and precipitation in siliconJournal of Applied Physics, 1984
- HREM of SiP precipitates at the (111) silicon surface during phosphorus predepositionUltramicroscopy, 1984
- Gettering of Metallic Impurities in SiliconMRS Proceedings, 1984
- Physical Modeling of Backside GetteringMRS Proceedings, 1984
- Gold gettering in silicon by phosphorous diffusion and argon implantation: Mechanisms and limitationsJournal of Applied Physics, 1981