A review of submicron lithography
- 1 January 1986
- journal article
- review article
- Published by Elsevier in Superlattices and Microstructures
- Vol. 2 (2) , 129-142
- https://doi.org/10.1016/0749-6036(86)90077-7
Abstract
No abstract availableThis publication has 23 references indexed in Scilit:
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