An evaluation of absorption correction functions for electron probe microanalysis

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Abstract
The absorption correction function necessary to quantitative electron probe microanalysis has been studied experimentally by a number of authors. The experimental data of these groups are systematically reviewed here to determine their dependence on primary electron accelerating potentialE0, excitation potential ratioUand atomic numberZ. The data are compared by assuming that the mean depth of x-ray production IMG1 characterizes the distribution of x-ray emission with depth Φ(ρz) accurately enough to show the influence ofE0,UandZon the absorption correction function. Monte Carlo calculations are used to show that IMG1 can be described by a modified approximation to the Bethe electron retardation law. The experimental data are then compared, using this modified approximation to take account of the influence ofE0,UandZ. On this basis there is good agreement among the various data that do not have large errors. This agreement suggests the possibility of a correction function based on the method of comparison used. The proposed correction function is compared to a well-accepted correction model over large ranges ofE0,UandZ.