Annealing effects on a-SiC:H and a-SiC:H(F) thin films deposited by PECVD at room temperature
- 1 June 1995
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 261 (1-2) , 192-201
- https://doi.org/10.1016/s0040-6090(94)06473-3
Abstract
No abstract availableThis publication has 45 references indexed in Scilit:
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