Laser patterning of metal oxide superconductor films by reactive solid-state transformation
- 1 February 1988
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Electron Device Letters
- Vol. 9 (2) , 68-70
- https://doi.org/10.1109/55.2043
Abstract
A planar submicrometer-resolution patterning method has been developed for fabrication of thin-film Ba/sub 2/YCu/sub 3/O/sub x/ devices without photoresist, water, or solvent exposure. The method is based on a rapid transformation from the superconductive to a dielectric phase. The phase change is induced by controlled changes in the oxygen stoichiometry which are induced thermally by local-area laser irradiation of the thin film in a gaseous ambient. Both extended-area pattern projection and scanned-beam direct writing have been demonstrated with a spatial resolution in the submicrometer range and are presently limited by the grain size of available films. Negligible thickness loss is observed in patterning. The method circumvents lithographic techniques which tend to degrade the electronic quality of Ba/sub 2/YCu/sub 3/O/sub x/ superconductors.<>Keywords
This publication has 11 references indexed in Scilit:
- Reversible laser chemically induced phase transformations in thin-film Ba2YCu3Ox superconductorsApplied Physics Letters, 1988
- Pulsed laser etching of high T c superconducting filmsApplied Physics Letters, 1987
- Preparation of superconducting YBa2Cu3Ox thin films by oxygen annealing of multilayer metal filmsApplied Physics Letters, 1987
- Annealing treatment effects on structure and superconductivity in Y1Ba2Cu3O9−xApplied Physics Letters, 1987
- Excimer-laser-induced etching of ceramic PbTi1−xZrxO3Journal of Applied Physics, 1987
- New phases in the superconducting Y:Ba:Cu:O systemApplied Physics Letters, 1987
- Crystallography and microstructure of Y1Ba2Cu3O9−x, a perovskite-based superconducting oxideApplied Physics Letters, 1987
- Crystallographic description of phases in the Y-Ba-Cu-O superconductorPhysical Review B, 1987
- Temperature rise induced by a laser beamJournal of Applied Physics, 1977
- Influence of AsH[sub 3], PH[sub 3],and B[sub 2]H[sub 6] on the Growth Rate and Resistivity of Polycrystalline Silicon Films Deposited from a SiH[sub 4]-H[sub 2] MixtureJournal of the Electrochemical Society, 1973