Lateral Silicide Growth
- 1 January 1983
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 11 references indexed in Scilit:
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- Implanted noble gas atoms as diffusion markers in silicide formationThin Solid Films, 1975
- Growth Kinetics Observed in the Formation of Metal Silicides on SiliconApplied Physics Letters, 1972