An inexpensive electron beam annealing apparatus with line focus, made from a converted electron welding machine

This publication has 5 references indexed in Scilit:

• Time-resolved defect production and annealing during electron-beam processing of silicon
  Applied Physics A, 1984
• Slip line free silicon in large-area multiple-scan annealing with a line-focused electron beam
  Physica Status Solidi (a), 1982
• Comparative structural and electrical characterization of scanning-electron- and pulsed-laser-annealed silicon
  Applied Physics Letters, 1980
• Characterisation of multiple-scan electron beam annealing method
  Electronics Letters, 1980
• Elektronen-Interferenzen in der Umgebung der Brennlinie einer magnetischen Quadrupollinse
  The European Physical Journal A, 1961