Insights into deposition processes for amorphous semiconductor materials and devices from real time spectroscopic ellipsometry
- 1 May 1996
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 198-200, 981-986
- https://doi.org/10.1016/0022-3093(96)00015-4
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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