Determination of the mechanical properties of r.f.-magnetron-sputtered zinc oxide thin films on substrates
- 1 May 1995
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 260 (1) , 58-64
- https://doi.org/10.1016/0040-6090(94)06459-8
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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