Efficient production of silicon-on-insulator films by co-implantation of He+ with H+

We have investigated the process of thin film separation by gas ion implantation and wafer bonding, as well as the more basic phenomenon of blistering, on which the technique is based. We show that when H and He gas implants are combined they produce a synergistic effect which enables thin-film separation at a much lower total implantation dose than that required for either H or He alone. By varying the H and He implantation doses we have been able to isolate the physical and chemical contributions of the gases to the blistering processes. We find that the essential role of H is to interact chemically with the implantation damage and create H-stabilized platelet-like defects, or microvoids. The efficiency of H in this action is linked to its effective lowering of the silicon internal surface energy. The second key component of the process is physical; it consists of diffusion of gas into the microvoids and gas expansion during annealing, which drives growth and the eventual intersection of the microvoids to form two continuous separable surfaces. He is more efficient than H for this process since He does not become chemically trapped at broken bonds and thus segregates into microvoids more readily. In particular, we have demonstrated that a 1$\times$ 10${}^{\mathrm{16}}$ cm${}^{\mathrm{-2}}$ He dose in combination with a 7.5$\times$ 10${}^{\mathrm{15}}$ cm${}^{\mathrm{-2}}$ H dose are sufficient to shear and transfer a thin silicon film onto a handle wafer after bonding the two wafers together.