Defect studies in oxygen-ion-irradiated silicon-based metal-insulator-semiconductor structures
- 1 October 1993
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 74 (7) , 4343-4346
- https://doi.org/10.1063/1.354400
Abstract
No abstract availableThis publication has 16 references indexed in Scilit:
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