The use of novel PtSi thin film structures in preferential sputtering measurements
- 1 November 1978
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 55 (1) , 83-88
- https://doi.org/10.1016/0040-6090(78)90076-7
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
- Surface-layer composition changes in sputtered alloys and compoundsApplied Physics Letters, 1977
- Surface enrichment of copper due to keV Xe sputtering of an Al-Cu mixtureJournal of Applied Physics, 1976
- Auger study of preferred sputtering on binary alloy surfacesSurface Science, 1976
- Sputtering of the alloy systems AgAu, AuCu, and AgCu studied by Auger electron spectroscopyNuclear Instruments and Methods, 1976
- The sputtering of PtSi and NiSiNuclear Instruments and Methods, 1976
- Change of surface composition of SiO2 layers during sputteringJournal of Applied Physics, 1974
- Quantitative auger analysis of copper-nickel alloy surfaces after argon ion bombardmentSurface Science, 1973
- The sputtering of oxides part i: a survey of the experimental resultsRadiation Effects, 1973
- Alloy Sputtering Studies with in situ Auger Electron SpectroscopyJournal of Applied Physics, 1971
- The penetration of positive ions of low energy into alloys and composition changes produced in them by sputteringJournal of Physics and Chemistry of Solids, 1959