Regulation of a microcantilever response by force feedback
- 10 May 1993
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 62 (19) , 2344-2346
- https://doi.org/10.1063/1.109413
Abstract
A feedback mechanism is used to control the forces incident on a mechanical microcantilever as a function of the monitored cantilever motion. The control is effected by modifying the intensity of an auxiliary laser beam that generates a thermally induced stress. The feedback is designed to reduce the effective resonance quality factor of the cantilever. The resultant regulation of the cantilever motion is shown to improve the measurement dynamics in atomic force microscopy, without significantly degrading the signal to noise ratio.Keywords
This publication has 13 references indexed in Scilit:
- Interaction force detection in scanning probe microscopy: Methods and applicationsJournal of Applied Physics, 1992
- Laser thermal effects on atomic force microscope cantileversUltramicroscopy, 1992
- Scanning attractive force microscope using photothermal vibrationJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1991
- Micromachined silicon sensors for scanning force microscopyJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1991
- Frequency modulation detection using high-Q cantilevers for enhanced force microscope sensitivityJournal of Applied Physics, 1991
- Magnetic force microscopy: General principles and application to longitudinal recording mediaJournal of Applied Physics, 1990
- An atomic-resolution atomic-force microscope implemented using an optical leverJournal of Applied Physics, 1989
- Erratum: Novel optical approach to atomic force microscopy [Appl. Phys. Lett. 5 3, 1045 (1988)]Applied Physics Letters, 1988
- Atomic force microscope–force mapping and profiling on a sub 100-Å scaleJournal of Applied Physics, 1987
- Atomic Force MicroscopePhysical Review Letters, 1986