Microstructure and ion beam characterization of heteroepitaxial Si1−x−yGexCy
- 1 September 1996
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 118 (1-4) , 633-639
- https://doi.org/10.1016/0168-583x(95)01463-2
Abstract
No abstract availableKeywords
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