CMOS-compatible capacitive high temperature pressure sensors
- 25 August 2000
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 85 (1-3) , 147-152
- https://doi.org/10.1016/s0924-4247(00)00385-x
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- A MOS switched-capacitor ladder filter in SIMOX technology for high temperature applications up to 300/spl deg/CIEEE Journal of Solid-State Circuits, 1996
- SOI 'SIMOX'; from bulk to surface micromachining, a new age for silicon sensors and actuatorsSensors and Actuators A: Physical, 1995
- Surface micromachined pressure sensors with integrated CMOS read-out electronicsSensors and Actuators A: Physical, 1994
- SOS strain gauge sensors for force and pressure transducersSensors and Actuators A: Physical, 1991
- Ultra-stable, high-temperature pressure sensors using silicon fusion bondingSensors and Actuators A: Physical, 1990