Ion energy effects on the intrinsic stress in BxNy layers deposited by ion-beam-assisted evaporation
- 5 December 1990
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 43-44, 137-144
- https://doi.org/10.1016/0257-8972(90)90068-n
Abstract
No abstract availableKeywords
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