Far-Infrared Spectroscopy of Thermally Annealed Tungsten Silicide Films

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Abstract
The far-infrared transmittance spectrum of tungsten silicide has been observed for the first time. WSi2 polycrystalline films were prepared by coevaporation and chemical-vapour deposition on silicon wafers, and subsequently thermally annealed at different temperatures. The observed structures are interpreted, on the basis of the symmetry properties of the crystal, such as infrared-active vibrational modes. Moreover, the marked lineshape dependence on annealing temperature enables this technique to analyse the formation of the solid silicide phases.