Ion Implantation into GaAs for Microwave Device Applications
- 1 April 1983
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Nuclear Science
- Vol. 30 (2) , 1713-1717
- https://doi.org/10.1109/TNS.1983.4332622
Abstract
No abstract availableKeywords
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