The effects of H/sub 2/-O/sub 2/-plasma treatment on the characteristics of polysilicon thin-film transistors
- 1 January 1993
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 40 (12) , 2301-2306
- https://doi.org/10.1109/16.249479
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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