Anomalous X-ray scattering study of composition profile in Fe/Mn superlattice films

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Abstract
The wavelength dependence of the X-ray diffraction peak intensity in the small-angle region has been measured on two Fe/Mn superlattice films using synchrotron radiation. Peak intensities are found to be greatly enhanced at a wavelength slightly longer than the K-absorption edge of the Mn atom (1.896 AA), where the contrast in X-ray scattering power of the adjacent Fe and Mn layers becomes significantly large because of the effect of anomalous dispersion. Higher-order reflections up to the seventh are observed for (Fe(15 AA)/Mn(50 AA))40 and up to the third for (Fe(20 AA)/Mn(20 AA))100. Analysis of the peak width and intensity reveals intermixing of the atoms extending over several atom layers ( approximately 10-12 AA) at Fe/Mn interfaces and the fluctuation of the superlattice period within approximately 3-4 AA.