Studies of the sputter deposition of carbon, silicon and SiC films
- 1 January 1982
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 87 (1) , 33-42
- https://doi.org/10.1016/0040-6090(82)90568-5
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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