Stress in thick sol-gel phosphosilicate glass films formed on Si substrates
- 1 January 1994
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 167 (1-2) , 16-20
- https://doi.org/10.1016/0022-3093(94)90361-1
Abstract
No abstract availableKeywords
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