Average power control and positioning of polysilicon thermal actuators
- 1 January 1999
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 72 (1) , 88-97
- https://doi.org/10.1016/s0924-4247(98)00211-8
Abstract
No abstract availableKeywords
This publication has 11 references indexed in Scilit:
- Process-dependent Thermophysical Properties Of CMOS IC Thin FilmsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Design and performance of constant-temperature circuits for microbridge-sensor applicationsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Thermally actuated piston micromirror arraysPublished by SPIE-Intl Soc Optical Eng ,1997
- Scanning and rotating micromirrors using thermal actuatorsPublished by SPIE-Intl Soc Optical Eng ,1997
- Applications for surface-micromachined polysilicon thermal actuators and arraysSensors and Actuators A: Physical, 1997
- Electrothermal responses of lineshape microstructuresSensors and Actuators A: Physical, 1996
- Theory and application of polysilicon resistor trimmingSolid-State Electronics, 1995
- Interferometric characterization of the flexure-beam micromirror devicePublished by SPIE-Intl Soc Optical Eng ,1994
- Determination of the thermal conductivity of CMOS IC polysiliconSensors and Actuators A: Physical, 1994
- Thermal conductivity of heavily doped low-pressure chemical vapor deposited polycrystalline silicon filmsJournal of Applied Physics, 1988