Impact of molecular weight of polymers and shear rate effects for nanoimprint lithography
- 28 February 2006
- journal article
- review article
- Published by Elsevier in Microelectronic Engineering
- Vol. 83 (2) , 259-280
- https://doi.org/10.1016/j.mee.2005.07.090
Abstract
No abstract availableKeywords
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