Simultaneous Determination of Thicknesses and Refractive Indices of Ultrathin Films by Multiple Incidence Medium Ellipsometry
- 29 August 2002
- journal article
- research article
- Published by American Chemical Society (ACS) in The Journal of Physical Chemistry B
- Vol. 106 (38) , 9723-9729
- https://doi.org/10.1021/jp025722m
Abstract
No abstract availableKeywords
This publication has 21 references indexed in Scilit:
- Simultaneous Thickness and Refractive Index Determination of Monolayers Deposited on an Aqueous Subphase by Null EllipsometryLangmuir, 2001
- An Intrinsic Relationship between Molecular Structure in Self-Assembled n-Alkylsiloxane Monolayers and Deposition TemperatureThe Journal of Physical Chemistry, 1994
- Determination of the optical properties of silicon/silica surfaces by means of ellipsometry, using different ambient mediaThe Journal of Physical Chemistry, 1993
- An Interface Enhanced Spectroscopic Ellipsometry Technique: Application to Si ‐ SiO2Journal of the Electrochemical Society, 1992
- Structure and reactivity of alkylsiloxane monolayers formed by reaction of alkyltrichlorosilanes on silicon substratesLangmuir, 1989
- Ellipsometry and polarized lightAnalytica Chimica Acta, 1987
- Parameter correlation and precision in multiple-angle ellipsometryApplied Optics, 1981
- Determination of refractive indexes of dielectric films by the use of immersion liquidsCrystal Research and Technology, 1981
- Parameter-Correlation and Computational Considerations in Multiple-Angle Ellipsometry*Journal of the Optical Society of America, 1971
- Importance of the Accuracy of Setting the Angle of Incidence in Ellipsometric Measurements on Surfaces Immersed in Liquids*Journal of the Optical Society of America, 1971