Pd/Si/Ti/Pt ohmic contact to n-type InGaAs for AlGaAs/GaAs HBT
- 30 June 2003
- journal article
- research article
- Published by Elsevier in Materials Letters
- Vol. 57 (19) , 2769-2775
- https://doi.org/10.1016/s0167-577x(02)01372-1
Abstract
No abstract availableKeywords
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