New conditions for synthesizing SOI structures by high dose oxygen implantation
- 1 December 1985
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 73 (3) , 546-550
- https://doi.org/10.1016/0022-0248(85)90020-x
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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