High-Resolution Soft X-Ray Microscopy
- 15 July 1977
- journal article
- research article
- Published by American Association for the Advancement of Science (AAAS) in Science
- Vol. 197 (4300) , 259-260
- https://doi.org/10.1126/science.406670
Abstract
X-ray micrographs of biological materials have been obtained with a resolution better than 100 angstroms by using x-ray resist as the recording medium. A high-resolution scanning electron microscope with a short-focal-length final lens, operating in the "low-loss" mode, is used to make the smallest features in the x-ray replica visible.This publication has 7 references indexed in Scilit:
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- Method for examining solid specimens with improved resolution in the scanning electron microscope (SEM)Applied Physics Letters, 1973
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- High-resolution pattern replication using soft X raysElectronics Letters, 1972
- High-resolution Positive Resists for Electron-beam ExposureIBM Journal of Research and Development, 1968