Effect of Substrate Temperature on the Crystalline State of Ba2ErCu3O7-x Superconducting Thin Films by rf Magnetron Sputtering
- 1 September 1988
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 27 (9A) , L1679-1682
- https://doi.org/10.1143/jjap.27.l1679
Abstract
The crystalline state of the Ba2ErCu3O7-x thin films deposited at various substrate temperatures by rf magnetron sputtering are investigated. The as-sputtered films deposited above 650°C have a layered-perovskite structure which exhibits superconductivity by an annealing process in an oxygen flow. The annealed films have a better crystalline state and better superconducting properies than the films annealed after the deposition at lower substrate temperatures. The spatial distribution of the film composition across the thickness is also studied by Rutherford backscattering spectrometry.Keywords
This publication has 11 references indexed in Scilit:
- Sputter Synthesis of Ba2YCu3Oy As-Deposited Superconducting Thin Films from Stoichiometric Target–A Mechanism of Compositional Deviation and Its ControlJapanese Journal of Applied Physics, 1988
- Crystal Structure of the Superconductor Ba1.8Nd1.2Cu3O7-yJapanese Journal of Applied Physics, 1987
- High Tc Superconductivity of rf-sputtered Er-Ba-Cu-O FilmsJapanese Journal of Applied Physics, 1987
- Preparation of Y-Ba-Cu-O Thin Films by Rf-Magnetron SputteringJapanese Journal of Applied Physics, 1987
- Structural and superconducting properties of orientation-ordered films prepared by molecular-beam epitaxyPhysical Review B, 1987
- Crystal Structure of the High Tc Superconductor LnBa2Cu3O7-δ (Ln=Sm, Eu and Gd)Japanese Journal of Applied Physics, 1987
- Crystal Structure of the High Tc Superconductor TmBa2Cu3O7-δJapanese Journal of Applied Physics, 1987
- Crystal Structure of the High Tc Superconductor YbBa2Cu3O7-δJapanese Journal of Applied Physics, 1987
- Superconductivity Transition and Crystal Structure of the High-Tc and High-Hc2 Superconductor DyBa2Cu3O7-δJapanese Journal of Applied Physics, 1987
- Sharp Superconductivity Transition at 94 K in HoBa2Cu3O7-δ and ErBa2Cu3O7-δJapanese Journal of Applied Physics, 1987