Obtention de films étain-azote par pulvérisation cathodique réactive-identification de la phase amorphe Sn3N4
- 1 December 1975
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 30 (2) , 197-204
- https://doi.org/10.1016/0040-6090(75)90084-x
Abstract
No abstract availableThis publication has 17 references indexed in Scilit:
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