Real-time monitoring and control during MOVPE growth of CdTe using multiwavelength ellipsometry
- 1 October 1993
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 233 (1-2) , 293-296
- https://doi.org/10.1016/0040-6090(93)90111-2
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- Techniques for ellipsometric measurement of the thickness and optical constants of thin absorbing filmsThin Solid Films, 1993
- Regression calibration method for rotating element ellipsometersThin Solid Films, 1993
- Optical control of growth of AlxGa1−xAs by organometallic molecular beam epitaxyApplied Physics Letters, 1990
- Automatic rotating element ellipsometers: Calibration, operation, and real-time applicationsReview of Scientific Instruments, 1990
- Correction for nonlinearity and polarization-dependent sensitivity in the detection system of rotating analyzer ellipsometersApplied Optics, 1989