CHARACTERIZATION OF SILICON SURFACES BY THE ELECTRON ENERGY-LOSS SPECTRUM
- 1 November 1970
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 17 (9) , 398-400
- https://doi.org/10.1063/1.1653452
Abstract
The energy‐loss spectra of silicon during several stages of the cleaning treatment have been studied in a LEED apparatus. The results suggest that the energy‐loss spectrum is sensitive to the change in chemical composition and electronic structure of the solid surface.Keywords
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